Resources – Tang Group for Active Material and NanoScience

Lab Instruments and Instructions

AE eBeam Evaporator

Upright Microscope

Probe Station

MAIA3 UHR SEM

NPGS Electron Beam Lithography

Atomic Layer Deposition

Vidoe SOP, Manual

10K-500K cryostat for electrical and optical measurement

XeF2 Gas phase Etcher

Jzvac Thermal Evaporator

RIE Plasma Etcher

Magnetron Sputtering System

Nanowire CVD growth furnace

Supercontinuum Laser

Leica DMi8 Confocal Microscope
lithographic patterning

SMART PRINT UV Maskless lithography system (Manual)

Alignment procedure

Olympus X81 Inverted Microscope

MultipalmSens4 Electrochemistry Workstation

CHI 660 Electrochemistry Station

Ultrasonic Emulsifier

ParticleMetrix ZetaView Cell clean and Training Videos

Ball Mill — Ball Mill Machine Focucy V-100

Neptune 4 Pro 3D printer

Manual, Software Instruction, Software Download, video instruction

Department Booking(intranet only)

Equipment Booking

Conference Room Booking

Weekly Report Template